產品型號: FCVA
Filtered Vacuum Arc is able to evaporatethe mat eri al of cathode by using arcdischarge and deposit this material on thesubstrate.The biggest problem in arc depositionis the droplets (macro part icles) formed,which can reach up to a few urn in size.These droplets adversely affect theproperty of thin films, especially thesurface morphology.By filtering macro and neutral particles.this system improves the overallproperties. such 85 hardness. surfacemorphology, and etc.
PDF規格表:
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Specifications |
SINGLE BENT |
Double bent |
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CATHODE |
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Material |
Graphite |
Graphite |
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Size |
Φ55x15(L)mm |
Φ55x15(L)mm |
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Body |
304 Stainless steel |
304 Stainless steel |
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DUCT |
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Beam Size |
I.D. Φ144mm |
I.D. Φ144mm |
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Angle |
45° |
45° |
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Material |
304 Stainless Steel |
304 Stainless Steel |
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Filtering |
Single |
Double. Easily converted to single-filtering |
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Magnet |
Source magnet (SM) Bending magnet (BM) Output magnet(OM) |
Source magnet (SM) Bending magnet (BM) Emission magnet(EM) Output magnet (OM) |